SENTECH – Plasma and metrology equipment
Founded in 1992, SENTECH is a German company manufacturing two types of equipment: systems for plasma processing (etching and deposition) and systems for metrology.
SENTECH’s plasma systems are ideal for customers seeking flexibility and the ability to carry out low-damage processes, thanks to the PTSA (Planar Triple Spiral Antenna) plasma source developed by SENTECH. The systems are also developed to include devices for precise process control, including in-situ process monitoring tools, so as to substantially improve the accuracy and speed of process development.
As far as etching is concerned, RIE and ICP-RIE models are available, as well as models for DRIE and cryogenic etching. As far as deposition systems are concerned, SENTECH offers both systems for ALD and PECVD, including ICPECVD.
SENTECH’s plasma equipment offer includes models for different applications and needs, from R&D to production. Depending on the model, samples can be loaded from as small as a few centimeters, up to 8” slices. Cluster systems are also available upon request, so as to have more efficient production and higher throughput.
For excellent quality control, wafer characterization, and process development, SENTECH’s metrology offerings include ellipsometers, both spectroscopic and laser, and reflectometers.
Different models of spectroscopic ellipsometers enable measurements across the entire spectral range, and can be selected for best results based on specific process parameters. Laser ellipsometers make stable and accurate contactless measurements of film thickness, refractive index, absorption and degree of polarization, which can be used as indicators of substrate features. SENTECH’s reflectometers measure optical reflectivity, film thickness, and refractive index on single or multiple semiconductor layers accurately and contactlessly over a range from UV to NIR.
To receive more information on our complete offer related to SENTECH’s systems, or details on an individual model offered, you can directly contact us at the “Contact Us” section of this website.