Horizontal furnaces
DEAM’s offer includes horizontal furnaces from ECM Greentech, a French company and leader of the industry at a globlal level. Thanks to their great expertise, ECM can offer models for both R&D and large-scale production.
Common features of ECM Greentech’s horizontal furnaces:
- Capability to run processes from vacuum to atmospheric pressure
- Process automation capability
- Possibility to make numerous variations to the basic configuration of the systems, in order to satisfy all customer’s requests
- Indendent heating zones for increased temperature uniformity
- User-friendly software, possibility to have SECS-GEM connection with the fab’s host computer
ECM Greentech’s furnaces can process wafers up to 8 inches, 12-inch systems are at an advanced stage of development, and can be discussed with the customer if requested.
The different processes that can be run by ECM’s furnaces include Annealing, wet oxidation (SiO2), doping (boron and phosphorus), diffusion, LYDOP/LYTOX, LPCVD (oxides, nitrides, silicon, tungsten, SiC, SiPOS).
High temperature vertical furnaces
In addition to the horizontal furnaces, ECM Greentech also offer high temperature vertical furnaces, both for R&D (up to 300mm) and production (up to 200mm). The main application of these systems is the processing of SiC and GaN, particularly oxidation, post-implant annealing and graphene growth.
To receive further information about our complete offer related ECM Greentech’s equipment, you can directly contact us at the “Contacts” section of this website.