Annealsys – RTP Furnaces and DLI equipment
In business since 2004, Annealsys, part of the ECM Group, is a French company that deals with heat treatment systems (RTP/RTA and high temperature furnaces) and DLI (Direct Liquid Injection) deposition systems.
Annealsys furnace process capabilities include RTA (Rapid Thermal Annealing), post implantation annealing, RTO (Rapid Thermal Oxidation), RTN (Rapid Thermal Nitridation), diffusion, crystallization, selenization and contact annealing, thus covering a wide range of different applications. Available models include both compact systems for R&D and systems for industrial production with automatic loading, for slice sizes up to 8”, so as to meet the needs of all customers.
Also available are furnaces for high-temperature processes, ideal for applications on materials such as SiC and graphene.
Annealsys’ offer also include deposition systems that take advantage of direct liquid injection (DLI) technology, which allows ALD and CVD processes to be carried out using special DLI vaporizers, which vaporize liquid precursors (including solids dissolved in a liquid) into the process chamber, instead of classic precursor input methods such as bubbler and vapor draw.
This method makes it possible to use a much larger number of precursors than standard technologies, including thermally unstable ones, and to control their flow with great precision.
To receive more information about our Annealsys furnace and deposition system offerings, please contact us directly at the “Contacts” section of this website.