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Below are some of the tool models that are usually available. The availability of any specific tool is anyway verified at the moment of the request.

Metrology

KLA Tencor 2139, 2351, 2360, 2365, 2367, 9000, 9110, 9130,9150
KLA Tencor 2139, 2351, 2360, 2365, 2367, 9000, 9110, 9130,9150
Hitachi S-9380, S-9360, S-9220, S-9200, S-8840, S-8820, S-5200, S-4800, S-4700
Hitachi S-9380, S-9360, S-9220, S-9200, S-8840, S-8820, S-5200, S-4800, S-4700

Lithography

Nikon S202A, S203B, S204B i7, i8, i9, i10, i11, i12, i14 G6, G7, G8 Canon MPA-600Super, MPA-600FA MPA-500FAb, I1, i2, i3, i4, iW, i5
Nikon S202A, S203B, S204B i7, i8, i9, i10, i11, i12, i14 G6, G7, G8 Canon MPA-600Super, MPA-600FA MPA-500FAb, I1, i2, i3, i4, iW, i5
TEL ACT8, ACT12 Mark 7, Mark 8
TEL ACT8, ACT12 Mark 7, Mark 8