Skip to content
RTS Semi – Furnaces

RTS can supply the following TEL and Kokusai furnace models:



TEL 150mm, 200 mm

Alpha-805, Alpha-808S, Alpha-8SE

IW-6C, IW-6D, UL-2604


Kokusai 150mm, 200 mm

DD-802V (DJ-802V), DD-813V (DJ-813V),

DD-815V (DJ-815V, Vacuum Chamber L/L),

DD-823V (DJ-823V), DD-853V (DJ-853V)

Forno RTS 1
Forno RTS 2

In addition to the above equipment list, RTS can provide service support on 300 mm TEL and Kokusai vertical furnaces. Service support includes PM’s, de-installation and relocation of the tools.