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Ultech manufactures and offers to its customers a broad range of systems for sputtering (including roll to roll), PLD, evaporation and other deposition technologies (CVD and ALD, including PECVD and PEALD) . In addition to that, both vertical and horizontal LPCVD furnaces are available. Below are some examples of the tools that are included in Ultech’s product offer, for a complete list of tools or specific questions on any tool feel free to contact us. 

SPS MC Series

SPS MC Series

  • Multi chamber system
  • Up to 6-inch substrates
  • Single wafer
  • Up to 6 targets
  • Flexible module configuration

This system’s main applications are coating of all common materials (metals, alloys, dielectrics), magnetic film and reactive film coating, interleaving conducting, semi-conducting, and insulating layers coating, reflective and ARC coating, optical and opto-electronic films coating. Maitenance can be done separately on chambers, which facilitates maintenance work and shortens start up time. 

Vertical LPCVD/Furnace

Vertical LPCVD/Furnace

  • Flexible use of 1 or 2 stacks
  • High throughput batch process
  • Automatic loading and unloading of the system
  • Excellent temperature uniformity

The tool’s main applications are low stress/stochiometric silicon nitride, poly/doped-poly silicon, silicon oxide and LTO. A separated circuit protects the furnace from exceeding temperature limit. 

E-beam evaporator (SEE-7 Series)

E-beam evaporator (SEE-7 Series)

  • Batch system
  • Various different wafer sizes
  • High deposition rates
  • Optional substrate heating
  • Crystal thickness sensor

The tool’s main applications are monolayer or multilayer conventional materials coating, alloy metal coating, organic materials coating and optical coatings of rotational symmetry planes.  

PECVD (PES-P Series)

PECVD (PES-P Series)

  • Single wafer
  • Up to 8-inch substrates
  • PC control
  • Wide temperature range options

The tool’s main applications are active optical device layers, interlayer dielectrics and gate oxide. 

Ultech also owns a 10,000 class clean room where they can run demos upon request.