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In completion of its products offer, Ultech manufactures systems for coating (spin and spray) and plasma doping. Furthermore, Ultech manufactures an OLED system and a system for the production of organic and perovskite solar cells, which can be included in a turnkey production line. 

 

Spray coating

Spray coating

  • For R&D and low volume production
  • Excellent repeatability and process uniformity
  • Auto process control
  • Sample size up to 12 inches

The tool’s main applications are photo-resist or thin film coating, films coating for 3D patterns, electroplating mold, sacrificial layer coating and electrical pattern connection.

OLED

OLED

  • Linear type system
  • Multi source deposition
  • Pretreatment chamber: O2, CF4 plasma
  • Encapsulation: UV curing and dispenser

The tool’s applications are mono, area panel and source testing, and mono, area color OLED device fabrication.

Spin coating

Spin coating

  • For R&D and low volume production
  • Excellent repeatability and process uniformity
  • Sample size 6 inches, single wafer 
  • System control with touch screen and PLC

The tool’s main applications are photoresist coating, dielectric/insulating layers coating, magnetic disk coating and flat screen display coating

Plasma doping

Plasma doping

  • Ultra-shallow junction doping for sub-100nm CMOS
  • Conformal doping of non-planar CMOS and other electronic devices
  • Poly-silicon gate and trench sidewall doping
  • Active metrix doping